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Processing and characterisation of an etched groove Permeable
Physica scripta. T. 1994; T54:56-59
Dummy photo Christer Fröjdh
EKS

Publication type:
Article in journal

Permanent link (URI):
http://urn.kb.se/resolve?urn=urn:nbn:se:miun:diva-1564

ISSN:
0281-1847

Abstract:

The Permeable Base Transistor (PBT) is generally considered as an interesting device for high speed applications. PBTs have been fabricated on Silicon and Gallium Arsenide by a number of groups. In this paper we reported on the fabrication of an etched groove PBT structure on 6H-SiC using Ti as contact metal for all electrodes. The devices have been characterised by DC-measurements. The transistors show the normal IV-characteristics for a such a device except for a parasitic series diode at the drain electrode. The breakdown voltage of the gate-drain diode is generally as high as around 60 V even without passivation of the sidewalls of the grooves.




Authors:
Fröjdh C, Thungström G, Hatzikonstantinidou S, Nilsson H, Petersson S

Internal co-authors:
Göran Thungström
Prof. Hans-Erik Nilsson, NMT

SCB areas:
Annan elektroteknik och elektronik