Add to My favourites Processing and characterisation of an etched groove Permeable Physica scripta. T. 1994; T54:56-59
Publication type: Article in journal Permanent link (URI): http://urn.kb.se/resolve?urn=urn:nbn:se:miun:diva-1564 ISSN: 0281-1847
Abstract: The Permeable Base Transistor (PBT) is generally considered as an interesting device for high speed applications. PBTs have been fabricated on Silicon and Gallium Arsenide by a number of groups. In this paper we reported on the fabrication of an etched groove PBT structure on 6H-SiC using Ti as contact metal for all electrodes. The devices have been characterised by DC-measurements. The transistors show the normal IV-characteristics for a such a device except for a parasitic series diode at the drain electrode. The breakdown voltage of the gate-drain diode is generally as high as around 60 V even without passivation of the sidewalls of the grooves. Authors: Fröjdh C, Thungström G, Hatzikonstantinidou S, Nilsson H, Petersson S Internal co-authors: SCB areas: |