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Processing of silicon UV-photodetectors
Nuclear Instruments and Methods in Physics Research, Section A: Accelerators, Spectrometers, Detectors and Associated Equipment. 2001; 460(1):165-184
Dummy photo Göran Thungström
EKS

Publication type:
Article in journal

Permanent link (URI):
http://urn.kb.se/resolve?urn=urn:nbn:se:miun:diva-1563

ISSN:
0168-9002

Abstract:

UV-enhanced photodetectors of both n+-p and p+-n type have been processed in silicon. Photodetectors of the p+-n type display a responsivity close to the theoretical limit with an antireflective coating of either thermally grown dry silicon dioxide or deposited oxide (TEOS), followed by a short wet oxidizing step. This holds, irrespective of whether the detector window is doped by boron through ion implantation or diffusion from a solid source. However, for p+-n photodiodes with a TEOS-oxide in the as-deposited state the responsivity decreases substantially for wavelenghts below 500 nm compared to the theoretical predictions. This is attributed to a high recombination velocity at the silicon dioxide/silicon interface, as supported by computer simulations of the detector performance. In contrast, n+-p photodiodes are found to be rather insensitive with respect to the properties of the silicon dioxide/silicon interface. These results provide the first experimental demonstration that high built in electric fields, caused by abrupt dopant profiles, can suppress the influence of a high interface carrier recombination velocity.




Authors:
Thungström G, Dubaric E, Svensson B

SCB areas:
Annan elektroteknik och elektronik